发明名称 |
Controlling the application of vaporized organic material |
摘要 |
A method for controlling the deposition of vaporized organic material onto a substrate surface; includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold. |
申请公布号 |
EP2278044(B1) |
申请公布日期 |
2017.02.08 |
申请号 |
EP20100009971 |
申请日期 |
2005.10.26 |
申请人 |
Global OLED Technology LLC |
发明人 |
Grace, Jeremy Matthew;Long, Michael;Boroson, Michael Louis;Zhang, Jinmei;Koppe, Bruce Edward;Palone, Thomas William;Redden, Neil Peter |
分类号 |
C23C14/24;C23C14/12;H01L51/40;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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