发明名称 Controlling the application of vaporized organic material
摘要 A method for controlling the deposition of vaporized organic material onto a substrate surface; includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
申请公布号 EP2278044(B1) 申请公布日期 2017.02.08
申请号 EP20100009971 申请日期 2005.10.26
申请人 Global OLED Technology LLC 发明人 Grace, Jeremy Matthew;Long, Michael;Boroson, Michael Louis;Zhang, Jinmei;Koppe, Bruce Edward;Palone, Thomas William;Redden, Neil Peter
分类号 C23C14/24;C23C14/12;H01L51/40;H05B33/10 主分类号 C23C14/24
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