发明名称 静電気除去装置及び静電気除去方法
摘要 Provided is a device for eliminating electrostatic discharge capable of preventing a foreign substance from being attached thereto and certainly avoiding a discharge effect, caused by electrostatic discharge. According to the present invention, an ionizer (2) is installed on a back surface (1b) of a fixing table (1) to prevent electrostatic discharge which is generated when a work (W), having a smooth flat back surface (Wb), is separated from a surface (1a) of the fixing table (1). In addition, the device is configured to discharge ionic wave from the ionizer (2) to a gap spatial unit (J), formed between a surface (1a) of the fixing table (1) and the back surface (Wb) of the work, through a hole (11) installed to penetrate the fixing table (1).
申请公布号 JP6077023(B2) 申请公布日期 2017.02.08
申请号 JP20150003219 申请日期 2015.01.09
申请人 株式会社伸興 发明人 宇澤 啓;久保 孝夫
分类号 H05F3/04;H01T23/00 主分类号 H05F3/04
代理机构 代理人
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