| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a product defect of a workpiece due to peel charging by properly removing static electricity accumulated when the workpiece is peeled from a table.SOLUTION: A processing device (1) sucks a wafer (W) held on a chuck table (5) or spinner table (14) by transport means (30, 50) and also changes a link of the spinner table (14) to a negative pressure generation source (8) to a link to an air supply source (9), jetting ionized air to the wafer (W) by ion blow means (6) when the wafer (W) is peeled from a suction chuck (7, 16), and allows transport means (30, 50) to transport the wafer when a determination part (41) determines the charging amount of the wafer (W) becomes less than a predetermined value. |
