| 摘要 |
According to measurement results of an encoder system, a stage driving system (124) that is a magnetic levitation type planar motor is controlled to drive and control a wafer stage (WST), and in the case where an abnormality of the driving and control of the wafer stage (WST) has been detected, the stage driving system (124) is controlled to apply a thrust in a vertical direction to the wafer stage (WST). With this operation, the pitching of the wafer stage (WST) can be avoided, which makes it possible to prevent damage of the wafer stage (WST) (in particular, scales provided on the stage upper surface) and structures (in particular, encoder heads and the like) placed immediately above the stage upper surface. |
