发明名称 加工装置
摘要 The invention provides a machining apparatus having a retaining component. The above retaining component has a light retaining workbench that is easy to dismount. The provided machining apparatus comprises the retaining component for holding a to-be-machined object; a machining component for machining the to-be-machined object held on the retaining component; and a machining feeding component for relatively machining and feeding the retaining component and the machining component in the machining and feeding direction. The retaining component is composed of a retaining workbench and a supporting pedestal. The retaining workbench has an attraction region for attracting and holding the to-be-machined object, and a periphery region surrounding the attraction region. The supporting pedestal supports the retaining workbench and enables the retaining workbench to be detachable, and attraction is transmitted to the above attraction region. The retaining workbench is formed by multi-porous ceramics, and a coating layer is applied to the region, except the attraction region, of the retaining workbench.
申请公布号 JP6078297(B2) 申请公布日期 2017.02.08
申请号 JP20120239837 申请日期 2012.10.31
申请人 株式会社ディスコ 发明人 馬路 良吾
分类号 H01L21/683;B24B41/06;H01L21/301 主分类号 H01L21/683
代理机构 代理人
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