| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorine-containing resin surface treatment method and a fluorine-containing resin surface treatment device which can improve adhesion to another material.SOLUTION: This invention provides a fluorine-containing resin surface treatment method comprising the step of treating a fluorine-containing resin surface by the plasma of the process gas in which the total concentration of silicon-containing gas and boron-containing gas is 0.05 ppm or more and 200 ppm or less. The invention also provides a fluorine-containing resin surface treatment device. |
