发明名称 接続材料、接続方法、半導体装置及び半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To solve such a problem that it is necessary that the thickness of a connection part is double (about 100 μm) or less of the existing solder at least in order to make a thermal resistance of the connection part equal to the thermal resistance of the existing high-lead solder when performing connection using the conventional Zn/Al/Zn clad material, further, it is necessary that the thickness of an Al layer is made thick as much as possible in order to exhibit a stress buffering function of the Al layer satisfactorily, furthermore, it is necessary that pressurization with a load of about 2 g/mm2 or more is performed upon the connection in order to obtain satisfactory connection and, as the result, a mass production cost is remarkably increased.SOLUTION: A semiconductor device includes a semiconductor element, a frame and a connection part which connects the semiconductor element and the frame. Therein, the connection part contains a Zn-Al alloy, and an interface between the connection part and the semiconductor element and an interface between the connection part and the frame have an area of Al oxide film of 0 to 5% with respect to an area of the total interface.
申请公布号 JP6078577(B2) 申请公布日期 2017.02.08
申请号 JP20150087211 申请日期 2015.04.22
申请人 株式会社日立製作所 发明人 岡本 正英;池田 靖;村里 有紀
分类号 B23K35/22;B23K1/00;B23K35/28;C22C18/04;H01L21/52;H01L23/02 主分类号 B23K35/22
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