| 摘要 |
PROBLEM TO BE SOLVED: To provide a frame body for holding a substrate that can safely store and transport a large size substrate in a square shape of 2 meters on a side or larger, and a transfer method of the same.SOLUTION: A frame body for holding a substrate is configured to have at least a metal frame part 11 formed of flat metal frame materials with a rectangle cross section, and coupling parts 16 composed of the metal frame material to connect four corners of the metal frame part 11 in a rectangular shape in the plane view; and a substrate support plate 13 extended inside four sides of the metal frame part 11 to support the substrate. The coupling part 16 has a nonmagnetic material of a non-suction part and a suction part 17 made of a magnetic material inside the nonmagnetic material, and the suction part 17 is attracted by an electromagnet. |
