| 摘要 |
PROBLEM TO BE SOLVED: To constitute a cleaning brush and a cleaning device so as not to re-stick, by effectively discharging dust separated from a dresser disc to the outside of a cleaning system, when cleaning the dresser disc of a CMP device.SOLUTION: A cleaning brush 3 in which a large number of brushes 31a are protrusively provided on an upper surface is formed by providing vertically penetrating through-holes 31b and 32a through which a nozzle 24 is inserted for jetting cleaning fluid to its inside and providing a recessed groove 32b on a lower surface faced with lower ends of the through-holes 31b and 32a, and constituted so that dust stuck to the brush 31a generated when cleaning the dresser disc is discharged to the outside from the recessed groove 32b by passing through a clearance between the periphery of the nozzle 24 and the inner surfaces of through-holes 31b and 32a together with the cleaning fluid.SELECTED DRAWING: Figure 6 |
