METHOD FOR PRODUCING A DIELECTRIC MAGNETO RESISTOR IN A SUBSTRATE TRENCH, A CORRESPONDING SUBSTRATE, AND A POWER TRANSISTOR

摘要

Substrates comprising a trench with walls and a base are increasingly used for standard components. The invention relates to a substrate characterised in that it comprises a dielectric magneto resistor (83) consisting of at least one first dielectric layer, which only adjoins the lower sections of the trench walls and the base of said trench (60). Parasitic capacitances can be reduced when using this substrate for power transistors.