发明名称 板状ワーク中心検出方法
摘要 The purpose of the present invention is to provide a method for detecting the center of a plate-shaped work, which can detect the center of a plate-shaped work having transparent properties as well as a plate-shaped work having light shielding properties. A work imaging device (1) comprises: a maintaining table (14) having a maintaining surface (14b) which maintains a plate-shaped work (Wt) having transparent properties; an imaging unit (17) which captures an image of the plate-shaped work maintained on the maintaining table from the top; and an imaging light (12) which has a light emitting surface (12a) with a larger area than the plate-shaped work, and emits light to the plate-shaped work from the bottom during imaging by the imaging unit. Light is emitted vertically to the plate-shaped work by securing a fixed distance (D) between the light emitting surface of the imaging light and the maintaining surface of the maintaining table. The height (H) of an imaging camera (17b) is set in order to capture an image of the outer circumference of the plate-shaped work in black and capture an image of the external side of the plate-shaped work in white. [Reference numerals] (17c) Determination unit; (17d) Detection unit
申请公布号 JP6075993(B2) 申请公布日期 2017.02.08
申请号 JP20120172135 申请日期 2012.08.02
申请人 株式会社ディスコ 发明人 福士 暢之
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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