发明名称 表示装置の作製方法
摘要 A display device is manufactured with five photolithography steps: a step of forming a gate electrode, a step of forming a protective layer for reducing damage due to an etching step or the like, a step of forming a source electrode and a drain electrode, a step of forming a contact hole, and a step of forming a pixel electrode. The display device includes a groove portion which is formed in the step of forming the contact hole and separates the semiconductor layer.
申请公布号 JP6076038(B2) 申请公布日期 2017.02.08
申请号 JP20120238507 申请日期 2012.10.30
申请人 株式会社半導体エネルギー研究所 发明人 山崎 舜平;小山 潤
分类号 G09F9/30;G02F1/1368;H01L21/336;H01L29/78;H01L29/786;H05B33/08 主分类号 G09F9/30
代理机构 代理人
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