发明名称 Particle suspensions used as low-contrast standards for inspection of liquids
摘要 In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological particles may include inspecting a standard particle solution using the optical analysis instrument. The standard particle solution may include a known concentration of standard particles suspended in solution with the standard particles having a defined size and shape distribution. The standard particles may have a refractive index that is substantially similar to a refractive index of the biological particles. The method may include assessing a concentration of standard particles in the standard particle solution from the inspection. The method may include assessing a difference between the assessed concentration of standard particles and the known concentration of standard particles. The method may include modifying one or more parameters of the optical analysis instrument based on the assessed difference between the concentrations. The method may include assessing a detection efficiency of the optical analysis instrument.
申请公布号 US9562846(B2) 申请公布日期 2017.02.07
申请号 US201414324872 申请日期 2014.07.07
申请人 KLA-Tencor Corporation 发明人 Kole Francisco;Christiaanse Johannes G. M.;Kirk Greg;Chow Winfred Tee
分类号 G01N15/02;G01N21/27;G01N15/00;G01N15/06;G01N1/28 主分类号 G01N15/02
代理机构 Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C. 代理人 Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C. ;Meyertons Eric B.
主权项 1. A standard particle suspension configured for use with at least one of human visual inspection and an optical analysis instrument, comprising: a solution; one or more pluralities of standard particles suspended in the solution, wherein each plurality of standard particles has a defined size and shape distribution, and wherein the standard particles have a defined refractive index and a buoyancy that is similar to biological particles; and one or more additives in the solution, wherein the additives adjust the refractive index difference of the standard particles with the solution to be similar to the refractive index difference of the biological particles and their native solution.
地址 Milpitas CA US