Methods of manufacturing large-area sputtering targets using interlocking joints

摘要

In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

主权项

1. A joined sputtering target comprising:
first and second discrete sputtering-target tiles (A) each comprising a sputtering material, and (B) disposed in direct mechanical contact with each other in a contact region at an interface therebetween, wherein (i) the interface comprises a recess disposed over the contact region, and (ii) the first tile comprises a beveled edge defining at least a portion of the recess; a region of metal powder (i) disposed over and in contact with the interface in the contact region, (ii) at least partially filling the recess, and (iii) disposed in contact with the first and second tiles; and a backing plate attached to surfaces of the first and second tiles opposite the region of metal powder.