Fluid handling structure, a lithographic apparatus and a device manufacturing method

摘要

A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary of a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; a gas supply opening at least partly surrounding and radially outward of the meniscus pinning feature; and optionally a gas recovery opening radially outward of the gas supply opening, wherein the gas supply opening, or the gas recovery opening, or both the gas supply opening and the gas recovery opening, has an open area per meter length which has a variation peripherally around the space.

主权项

1. A fluid handling structure for a lithographic apparatus, the fluid handling structure comprising:
a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from a space configured to contain immersion fluid; and a gas supply opening, outward relative to the space of the meniscus pinning feature, at least partly surrounding the meniscus pinning feature, wherein the gas supply opening has an open area per meter length which has a variation peripherally around the space at least partly achieved by a change in a width of an opening of the gas supply opening and/or at least partly achieved by having a first plurality of side-by-side openings of the gas supply opening arranged along a direction having a first pitch different than a second pitch of a different second plurality of side-by-side openings of the gas supply opening arranged along the direction, the first plurality of openings being side-by-side along the direction with the second plurality of openings.