Charged particle beam writing apparatus, and buffer memory data storage method

摘要

A charged particle beam writing apparatus includes a buffer memory including a memory region capable of contemporarily storing writing data for data processing regions, wherein writing data including data files is temporarily stored for each of the data processing regions, a dividing unit to divide the memory region of the buffer memory into a first region being large and a second region being small, a specifying unit to specify the memory region such that a data file being large is preferentially stored in the first region and a data file being small is stored at least in the second region, concerning the data files for each of the data processing regions included in the writing data, and a data processing unit to read data files corresponding to each of the data processing regions from the buffer memory, and to perform data processing using the read data files.

主权项

1. A charged particle beam writing apparatus comprising:
a buffer memory configured to include a memory region capable of contemporarily storing writing data for a plurality of data processing regions obtained by virtually dividing a writing region of a target object to be written using a charged particle beam, wherein writing data including a plurality of data files is temporarily stored for each of the plurality of data processing regions; a dividing unit configured to divide the memory region of the buffer memory into a first region whose region size is large and a second region whose region size is smaller than the region size of the first region; a region specifying unit configured to specify the memory region of the buffer memory wherein a data file in which pattern data of a cell pattern composed of at least one figure to be written on the target object using the charged particle beam is defined has priority to be stored in the first region and a data file in which position data indicating a position on the target object of writing the cell pattern using the charged particle beam is defined is stored at least in the second region, with respect to the plurality of data files for the each of the plurality of data processing regions included in the writing data; a data processing unit configured to read the plurality of data files corresponding to the each of the plurality of data processing regions from the buffer memory, and to perform data processing using the plurality of data files having been read; and a writing unit configured to write a pattern on the target object with charged particle beams, in accordance with content of the data processing, for the each of the plurality of data processing regions.