Method and arrangement for manufacturing a radiation window

摘要

In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.

主权项

1. A method for manufacturing a radiation window, comprising, in the following order:
producing an etch stop layer on a solid carrier, the etch stop layer being a material that is not affected by an etching agent that is used to remove the solid carrier in a later step, bonding a solid layer on said etch stop layer, thus producing a layered structure where said etch stop layer exists between said solid carrier and said solid layer, attaching a blank to a radiation window frame, said blank containing at least a part of each of said solid carrier, said etch stop layer, and said solid layer, and removing at least a part of said solid carrier that was contained in said blank with said etching agent, thus leaving a foil attached to said radiation window frame, wherein said foil contains at least a part of each of said etch stop layer and said solid layer.