PHOTOMASK LAMINATE COMPRISING THE PHOTOMASK METHOD FOR MANUFACTURING THE PHOTOMASK AND DEVICE FOR FORMING PATTERN USING THE PHOTOMASK,申请号KR20150106833-传众专利搜索

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发明名称	PHOTOMASK LAMINATE COMPRISING THE PHOTOMASK METHOD FOR MANUFACTURING THE PHOTOMASK AND DEVICE FOR FORMING PATTERN USING THE PHOTOMASK
摘要	본 명세서는 포토마스크, 상기 포토마스크를 포함하는 적층체, 상기 포토마스크의 제조방법 및 상기 포토마스크를 이용하는 패턴형성방법에 관한 것이다.
申请公布号	KR20170013750(A)	申请公布日期	2017.02.07
申请号	KR20150106833	申请日期	2015.07.28
申请人	주식회사 엘지화학	发明人	손용구;이기석;이승헌
分类号	G03F1/38;G03F1/48	主分类号	G03F1/38
代理机构		代理人
主权项
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