Polycrystalline silicon ingot, preparation method thereof, and polycrystalline silicon wafer

摘要

Disclosed is a preparation method of a polycrystalline silicon ingot. The preparation method comprises: providing a silicon nucleation layer at the bottom of a crucible, and filling a silicon material above the silicon nucleation layer; heating the silicon material to melt same, adjusting the thermal field inside the crucible to make the melted silicon material to start crystallization on the basis of the silicon nucleation layer; and when the crystallization is finished, performing annealing and cooling to obtain a polycrystalline silicon ingot. By adopting the preparation method, a desirable initial nucleus can be obtained for a polycrystalline silicon ingot, so as to reduce dislocation multiplication during the growth of the polycrystalline silicon ingot. Further disclosed are a polycrystalline silicon ingot obtained through the preparation method and a polycrystalline silicon wafer made using the polycrystalline silicon ingot as a raw material.

主权项

1. A method for preparing polycrystalline silicon ingot, comprising:
(1) laying a microcrystalline nucleating source layer at the bottom of the crucible, the microcrystalline nucleating source layer is microcrystalline silicon and/or amorphous silicon; thickness of the microcrystalline nucleating source layer is a first height; the microcrystalline nucleating source layer is the nucleating source of silicon material layer; (2) feeding silicon onto the microcrystalline nucleating source layer, melting the silicon to form molten silicon by heating, wherein a solid-liquid interface formed after the silicon is melted completely reaches the surface of the microcrystalline nucleating source layer or is deep into the microcrystalline nucleating source layer and the height to the bottom of the crucible is greater than or equal to 1 mm, regulating a thermal field to achieve supercooled state to grow crystals from the molten silicon on the base of the microcrystalline nucleating source layer; (3) after the crystallization of molten silicon is completely finished, performing annealing and cooling to obtain polycrystalline silicon ingot.