发明名称 |
Defined dosing atmospheric temperature and pressure vapor deposition system |
摘要 |
A closed chemical introduction system used to deliver active ingredients in liquid chemical to a chemical vapor deposition system includes a robust, moisture-free cartridge containing a defined dose of liquid chemical. The cartridge is placed on a mounting slot specially configured to receive the cartridge. Upon initiating the system, a first linear mechanical actuator securely holds the cartridge in the slot, while an extraction lance attached to a second linear mechanical actuator punctures the cartridge from the bottom, extracts the liquid chemical and delivers it to a vaporization chamber. The vaporization chamber evaporates the liquid chemical and delivers the vapors containing the active ingredients to the chemical vapor deposition system. The chemical vapor deposition system may include a treatment chamber, a conveyor, a compressed clean air system to provide separate treatment compartments within the chamber, a moisture system, a chemical vapor system, and a neutralization system to neutralize harmful byproducts. |
申请公布号 |
US9562288(B2) |
申请公布日期 |
2017.02.07 |
申请号 |
US201414260233 |
申请日期 |
2014.04.23 |
申请人 |
DIAMON FUSION INTERNATIONAL, INC. |
发明人 |
Slaybaugh Russell C.;Metcalfe Michael Stephen;Zax Adam;Seta Guillermo |
分类号 |
C23C16/00;C23C16/448;C23C16/52;C23C16/44;C23C16/455;C23C16/54 |
主分类号 |
C23C16/00 |
代理机构 |
Innovation Capital Law Group, LLP |
代理人 |
Innovation Capital Law Group, LLP ;Lin Vic |
主权项 |
1. A method of automatically introducing air sensitive liquid chemical to a substrate in a closed chemical vapor deposition system comprising:
providing a moisture-free cartridge containing a defined dosage of specific liquid chemical for a chemical vapor deposition process; providing a closed extraction mechanism to extract the liquid chemical from the cartridge; providing a mounting slot in a chemical introduction system configured to receive the cartridge that matches the mounting slot; providing a cartridge securing mechanism above the mounting slot that is movable in a vertical direction to secure the cartridge during liquid chemical extraction; providing an extraction lance attached to a separate lower linear mechanical actuator below the mounting slot that is movable in a vertical direction to extract liquid chemical from the cartridge; providing a chemical collection block to collect the extracted liquid chemical; and vaporizing and delivering active ingredients in the extracted liquid chemical to a treatment chamber of the chemical vapor deposition system. |
地址 |
Irvine CA US |