发明名称 |
Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod |
摘要 |
Methodology and system for using vacuum pods to store/transport semiconductor wafers to efficiently reduce contamination of the wafers while reducing cost, cycle time, and process steps and tools without the need for a complete reconfiguration of processes/tools in the fabrication facility are disclosed. Embodiments include configuring a wafer pod with an isolated vacuum environment for storing and transporting semiconductor wafers; configuring a load port module with an isolated vacuum environment to interface with the wafer pod; transporting the wafer pod, including semiconductor wafers, to interlock with the load port module; creating a merged vacuum environment including the isolated vacuum environments of the wafer pod and the load port module; increasing a pressure level in the merged vacuum environment for creating a merged ambient atmospheric environment; and transferring the semiconductor wafers through a transfer chamber, with an isolated environment, from the load port module to a semiconductor wafer processing device. |
申请公布号 |
US9564350(B1) |
申请公布日期 |
2017.02.07 |
申请号 |
US201514858475 |
申请日期 |
2015.09.18 |
申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
Fosnight William;Waite Stephanie |
分类号 |
H01L21/67;H01L21/677;B25J11/00 |
主分类号 |
H01L21/67 |
代理机构 |
Ditthavong & Steiner, P.C. |
代理人 |
Ditthavong & Steiner, P.C. |
主权项 |
1. A method comprising:
configuring a wafer pod with an isolated vacuum environment for storing and transporting semiconductor wafers; configuring a load port module with an isolated vacuum environment to interface with the wafer pod; transporting the wafer pod, including semiconductor wafers, to interlock with the load port module; creating a merged vacuum environment including the isolated vacuum environments of the wafer pod and the load port module; increasing a pressure level in the merged vacuum environment for creating a merged ambient atmospheric environment; and transferring the semiconductor wafers through a transfer chamber, with an isolated environment, from the load port module to a semiconductor wafer processing device, wherein the transfer chamber is separate and distinct from the load port module. |
地址 |
Grand Cayman KY |