Method for manufacturing NO₂gas sensor for detection at room temperature

摘要

A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.

主权项

1. A method for manufacturing an NO2 gas sensor for detection at room temperature, comprising:
manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode to form the NO2 gas sensor for detection at room temperature, wherein manufacturing the SWCNTs/SnO2 sensitive film comprises: disproportionating CO under a high pressure to generate a carbon nano tube, mixing the carbon nano tube with an organic metal solution of 2-ethylhexanoate and performing ultrasonic oscillation for 1.5 to 2.5 hours to obtain a homogeneous mixed suspension liquid; then coating the suspension liquid on a SiO2 base with spinning, dispensing, dip-coating or screen printing and drying to evaporate solvent in a suspension liquid coating; then calcining the SiO2 base for which the solvent in the suspension liquid coating is evaporated to obtain the SWCNTs/SnO2 sensitive film bonded with the SiO2 base; and finally etching to remove the SiO2 base with HF acid to separate the SWCNTs/SnO2 sensitive film from the SiO2 base so as to obtain the SWCNTs/SnO2 sensitive film.