发明名称 Multi-bit ferroelectric memory device and methods of forming the same
摘要 Multi-bit ferroelectric memory devices and methods of forming the same are provided. One example method of forming a multi-bit ferroelectric memory device can include forming a first ferroelectric material on a first side of a via, removing a material to expose a second side of the via, and forming second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via.
申请公布号 US9564576(B2) 申请公布日期 2017.02.07
申请号 US201514941088 申请日期 2015.11.13
申请人 Micron Technology, Inc. 发明人 Karda Kamal M.;Gealy F. Daniel;Ramaswamy D. V. Nirmal;Mouli Chandra V.
分类号 G11C11/22;H01L43/02;H01L43/12;G11C11/56;H01L27/115;H01L49/02 主分类号 G11C11/22
代理机构 Brooks, Cameron & Huebsch, PLLC 代理人 Brooks, Cameron & Huebsch, PLLC
主权项 1. A memory device, comprising: a first ferroelectric material formed on an interior side of a via; and a second ferroelectric material formed on an exterior side of the via; wherein the first ferroelectric material has a different thickness than the second ferroelectric material.
地址 Boise ID US
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