发明名称 |
Multi-bit ferroelectric memory device and methods of forming the same |
摘要 |
Multi-bit ferroelectric memory devices and methods of forming the same are provided. One example method of forming a multi-bit ferroelectric memory device can include forming a first ferroelectric material on a first side of a via, removing a material to expose a second side of the via, and forming second ferroelectric material on the second side of the via at a different thickness compared to the first side of the via. |
申请公布号 |
US9564576(B2) |
申请公布日期 |
2017.02.07 |
申请号 |
US201514941088 |
申请日期 |
2015.11.13 |
申请人 |
Micron Technology, Inc. |
发明人 |
Karda Kamal M.;Gealy F. Daniel;Ramaswamy D. V. Nirmal;Mouli Chandra V. |
分类号 |
G11C11/22;H01L43/02;H01L43/12;G11C11/56;H01L27/115;H01L49/02 |
主分类号 |
G11C11/22 |
代理机构 |
Brooks, Cameron & Huebsch, PLLC |
代理人 |
Brooks, Cameron & Huebsch, PLLC |
主权项 |
1. A memory device, comprising:
a first ferroelectric material formed on an interior side of a via; and a second ferroelectric material formed on an exterior side of the via; wherein the first ferroelectric material has a different thickness than the second ferroelectric material. |
地址 |
Boise ID US |