FAULT DETECTION AND CLASSIFICATION MATCHING

摘要

Raw data from chambers is received. Based on received raw data, if a fault exists in operations of the chambers is detected. The detecting includes at least one of operations outlined below. Sigma values respectively corresponding to the chambers are generated based on the raw data of the chambers. A determination is made to determine whether a sigma ratio corresponding to the sigma values is smaller than a threshold value. Mean outlier indexes respectively corresponding to the chambers is generated by executing a mean matching process for the chambers in a condition that the sigma ratio is smaller than the threshold value. One of the chambers, which has a worst first mean outlier index of the first mean outlier indexes, is identified as a target chamber having fault operation.

主权项

1. A method comprising:
receiving raw data from a plurality of chambers; based on received raw data of the chambers, detecting if a fault exists in operations of the chambers, wherein the detecting comprises at least one of:
based on the received raw data of the chambers, generating a plurality of first sigma values corresponding to the chambers;in a condition that a sigma ratio corresponding to the first sigma values is smaller than a threshold value, generating a plurality of first mean outlier indexes corresponding to the chambers by executing a mean matching process for the chambers; andidentifying that one of the chambers, which has a worst first mean outlier index of the first mean outlier indexes, is a target chamber having fault operation.