PIEZOELECTRIC PRESSURE SENSOR

摘要

A piezoelectric pressure sensor includes a sensor housing enclosing a membrane, a piezoelectric sensor, an electrode arrangement and a pre-stressing body. The membrane captures a pressure profile causing polarization charges generated on the piezoelectric sensor. The electrode arrangement receives the polarization charges generated and includes a charge-pick-off and a charge output. The charge pick-off is electrically and mechanically connected to the charge output, which is electrically is mechanically connected to the pre-stressing body via an electrical feedthrough arrangement on a side of the pre-stressing body that faces away from the membrane and seals the third gap in a pressure-tight manner from an environment of the third gap.

主权项

1. A piezoelectric pressure sensor comprising:
a sensor housing assembly; a membrane configured and disposed in the sensor housing assembly for capturing a pressure profile; a piezoelectric sensor disposed in the sensor housing assembly and configured for generating polarization charges from the pressure profile captured by the membrane; an electrode arrangement disposed in the sensor housing assembly to receive the generated polarization charges and including a charge output and a charge-pick-off electrically and mechanically connected to the charge output; a pre-stressing body disposed in the sensor housing assembly and electrically insulated from the charge output by a third gap; and an electrical feedthrough arrangement disposed in the sensor housing assembly and that seals the third gap from an environment in a pressure-tight manner and mechanically connects the charge output to the pre-stressing body on a side of the pre-stressing body that faces away from the membrane.