MIRROR MICROMECHANICAL STRUCTURE AND RELATED MANUFACTURING PROCESS

摘要

A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

主权项

1. A mirror micromechanical structure, comprising:
a supporting body made of semiconductor material and having a top surface including a cavity; a mobile mass having a top surface coplanar with the top surface of the supporting body and suspended above the cavity in a configuration which permits oscillation of the mobile mass about an axis of rotation; a mirror element supported by the mobile mass in a condition of rest to reflect an incident light beam at a rest angle; wherein the mirror element further causes the reflected light beam to travel over an angular range bisected by the rest angle in response to oscillation of the mobile mass; and wherein the cavity is shaped in a direction perpendicular to the axis of rotation so that the supporting body does not block the reflected light beam over the angular range.