| 发明名称 |
ULTRASONIC DEVICE, PIEZOELECTRIC DEVICE, ULTRASONIC MEASUREMENT APPARATUS, AND ELECTRONIC INSTRUMENT |
| 摘要 |
An ultrasonic device includes an element substrate provided with an ultrasonic transducer array in which a plurality of ultrasonic transducers are arranged in an array, a sealing plate (array counter plate) that is bonded to the element substrate and covers at least the ultrasonic transducer array, and a support substrate that supports at least one of the element substrate and the sealing plate, and the support substrate has a through hole (insertion section) into which at least part of the sealing plate is inserted. |
| 申请公布号 |
US2017028440(A1) |
申请公布日期 |
2017.02.02 |
| 申请号 |
US201615210096 |
申请日期 |
2016.07.14 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
KIYOSE Kanechika |
| 分类号 |
B06B1/06;H01L41/09;H01L41/113;H01L41/053 |
主分类号 |
B06B1/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An ultrasonic device comprising:
an element substrate provided with an ultrasonic transducer array in which a plurality of ultrasonic transducers are arranged in an array; an array counter plate that is bonded to the element substrate and covers at least the ultrasonic transducer array; and a support substrate that supports at least one of the element substrate and the array counter plate, wherein the support substrate has an insertion section into which at least part of the array counter plate is inserted. |
| 地址 |
Tokyo JP |
