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发明名称
モノリシックメッシュ支持型EUV膜
摘要
【課題】モノリシックメッシュ支持型EUV膜を提供する。【解決手段】本出願は、EUV透過式支持メッシュ及び同支持メッシュの製造方法を教示する。【選択図】図1B
申请公布号
JP2017504080(A)
申请公布日期
2017.02.02
申请号
JP20160566848
申请日期
2014.12.29
申请人
ラクセル コーポレーション
发明人
レアソン,ブルース;グローブ,デイビッド;ロペス,ハイジ;エアーズ,トラビス
分类号
G03F1/62;G03F1/22
主分类号
G03F1/62
代理机构
代理人
主权项
地址
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