COMPOSITIONALLY GRADED PHOTODETECTORS

摘要

An ultraviolet photodetector for a sensor device includes a film deposited on a substrate. The film includes a compositionally graded magnesium-zinc oxide having a ratio of magnesium-to-zinc that decreases between a portion of the film adjacent to the substrate and a portion of the film opposite the substrate for shifting the peak absorption of the film toward the visible wavelengths of the electromagnetic spectrum.

主权项

1. An ultraviolet (UV) photodetector, comprising:
a substrate; an electrode coupled to the substrate; and a compositionally graded magnesium-zinc oxide film deposited on the substrate and connected to the electrode, wherein the film has a zinc content that increases from a portion of the film adjacent the substrate to a portion of the film opposite the substrate to red shift the peak absorption of the film.