发明名称 |
DISCHARGE DEVICE AND DISCHARGE METHOD FOR LIQUID MATERIAL CONTAINING SOLID PARTICLES, AND COATING DEVICE |
摘要 |
[Problem] To provide a device and a method that are for discharging a liquid that has solid particles dispersed therein, wherein additional structures for dispersing the solid particles are kept to a minimum. [Solution] A discharge device and a coating device. The discharge device is provided with: a storage container for a solid-particle-containing liquid material; a measurement part that has a measurement hole; a plunger that is inside the measurement hole; a nozzle; a switching valve that has a first position, at which the storage container and the measurement part are made to communicate, and a second position, at which the measurement part and the nozzle are made to communicate; a plunger drive device; a switching valve drive device; and a discharge control device. The discharge device has a discharge control program that includes: a filling step wherein the switching valve is put into the first position and the inside of the measurement hole is filled with the liquid material; an excretion step wherein the switching valve is put into the second position and the liquid material inside the measurement hole is discharged from a discharge port; an inflow step wherein the switching valve is put into the first position and the liquid material inside the measurement hole flows into the storage container; a discharge step wherein the filling step and the excretion step are executed in succession; and a mixing step wherein the filling step and the inflow step are executed continuously in succession. |
申请公布号 |
WO2017018304(A1) |
申请公布日期 |
2017.02.02 |
申请号 |
WO2016JP71342 |
申请日期 |
2016.07.21 |
申请人 |
MUSASHI ENGINEERING, INC. |
发明人 |
IKUSHIMA, Kazumasa |
分类号 |
B05C5/00;B05C11/10;B05D1/26;B05D7/24;H01L33/50 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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