| 摘要 |
One embodiment of the present invention relates to a jacket heater that encloses a pipe or a tube gas conduit in order to maintain a steady temperature inside the pipe or tube of semiconductor equipment. The jacket heater may comprise: an outer cover that encloses the gas conduit and constitutes the outer surface of the jacket heater; an inner cover that contacts the gas conduit and constitutes the inner surface of the jacket heater; an insulator disposed contacting the outer cover between the outer cover and the inner cover; a conductive plate disposed contacting the insulator between the insulator and the inner cover, and connected to an external ground terminal; an outer glass fiber disposed contacting the conductive plate between the conductive plate and the inner cover; an explosion-proof thermal cable that is a heat emitting hot wire for generating heat and disposed on the surface of the outer glass fiber between the outer glass fiber and the inner cover, and that is constituted of an explosion-proof metal material; and a power input terminal provided on one end of the explosion-proof thermal cable and receiving power from an external power source. |
