发明名称 |
CHARGE DYNAMICS EFFECT FOR DETECTION OF VOLTAGE CONTRAST DEFECT AND DETERMINATION OF SHORTING LOCATION |
摘要 |
A method and apparatus for detecting VC defects and determining the exact shorting locations based on charging dynamics induced by scan direction variation are provided. Embodiments include providing a substrate having at least a partially formed device thereon, the partially formed device having at least a word-line, a share contact, and a bit-line; performing a first EBI on the at least partially formed device in a single direction; classifying defects by ADC based on the first EBI inspection; selecting DOI among the classified defects for further review; performing a second EBI on the DOI in a first, second, third, and fourth direction; comparing a result of the first direction against a result of the second direction and/or a result of the third direction against a result of the fourth direction; and determining a shorting location for each DOI based on the one or more comparisons. |
申请公布号 |
US2017032929(A1) |
申请公布日期 |
2017.02.02 |
申请号 |
US201514812317 |
申请日期 |
2015.07.29 |
申请人 |
GLOBALFOUNDRIES Inc. |
发明人 |
LEI Ming;MIN Byoung-Gi |
分类号 |
H01J37/22;H01J37/26 |
主分类号 |
H01J37/22 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
providing a substrate having at least a partially formed device thereon, the partially formed device having at least a word-line, a share contact, and a bit-line; performing a first electron beam inspection (EBI) on the at least partially formed device in a single direction; classifying defects by automatic defect classification (ADC) based on the first EBI inspection; selecting defects of interest (DOI) among the classified defects for further review; performing a second EBI on the DOI in a first, second, third, and fourth direction; comparing a result of the first direction against a result of the second direction and/or a result of the third direction against a result of the fourth direction; and determining a shorting location for each DOI based on the one or more comparisons. |
地址 |
Grand Cayman KY |