DYNAMIC RESPONSE ANALYSIS PROBER

摘要

The present invention relates to a prober wherein when performing response analysis for a dynamic signal for a miniature electronic device, an input waveform for a dynamic electric signal to be applied to a probe is formed, and the output waveform of the dynamic electric signal that is output via a sample is observed. The input waveform is preferably formed so that the output waveform of the dynamic electric signal output via the sample is substantially pulse shaped. As a result, high-speed dynamic signal response analysis at or above the megahertz level can be carried out on a miniature electronic device such as a miniature transistor that constitutes an LSI circuit.