| 摘要 |
This EUV light generation device may comprise: a chamber having a first through-hole for letting a pulsed laser light therein; a target supply unit held by the chamber, and sending-out a target toward a predetermined region inside the chamber; a shield member disposed inside the chamber so as to surround the predetermined region, and having a target passage whereby a target sent out from the target supply unit is let through toward the predetermined region; and a cylindrical member disposed in such a manner as to enclose, from among the trajectory of the target from the target supply unit to the predetermined region, at least a portion on the side more upstream than the target passage. |
