VACUUM VALVE

摘要

A vacuum valve according to embodiments of the present disclosure, comprising: an electrode having a first surface which a hollow part is formed on, which electrode spiral electrode slits which slantingly cross an axial direction are formed on outer circumference of, a conductor fixed on a second surface of the electrode, which second surface is opposite side of the first surface, a contact point having a first concavity which opens to the conductor side, which contact point is fixed on the first surface of the electrode, and a connecting plate whose resistivity is lower than one of the contact point, which connecting plate is disposed inside the first concavity, and connecting plate slits which extend inward from circumference as a starting point are formed on, wherein central axes of the connecting plate slits incline in a rotatory direction of the spiral of the electrode slits.

主权项

1. A vacuum valve, comprising:
an electrode having a first surface which a hollow part is formed on, wherein spiral electrode slits are slantingly formed and cross an axial direction on an outer circumference of said electrode; a conductor fixed on a second surface of the electrode, wherein said second surface is opposite the first surface; a contact point having a first concavity which opens to the conductor side, wherein said contact point is fixed on the first surface of the electrode; and a connecting plate whose resistivity is lower than the contact point, wherein said connecting plate is disposed inside the first concavity, and connecting plate slits which extend inward from circumference as a starting point are formed on said connecting plate, wherein central axes of the connecting plate slits incline in a rotatory direction of the spiral of the electrode slits against a line which connects a center point of the connecting plate and a center point of a radial direction on the starting point of the connecting plate slits, as viewed from the contact point side.