POSITION MEASURING DEVICE

摘要

A position measuring device includes a measuring standard and a scanning unit, which are arranged in a manner that allows them to move relative to each other in a measuring direction. The measuring standard includes a graduation, which is scannable by the scanning unit in order to generate positional signals. The scanning unit includes an illumination unit and a detector unit for generating positional signals, the illumination unit being able to emit light in the direction of the graduation and the detector unit being able to detect light modulated by the graduation. The detector unit includes a circuit board and a sensor unit, which is arranged as a semiconductor chip. At least two photodetectors are provided on a front side of the sensor unit facing the graduation, and the electrical connections of the sensor unit are routed to contact surfaces on its rear side by metallic vias. The sensor unit is connected via the contact surfaces to corresponding contact surfaces on the circuit board.

主权项

1. A position measuring device, comprising:
a measuring standard; and a scanning unit; wherein the measuring standard and the scanning unit are movable relative to each other in a measurement direction; wherein the measuring standard includes a graduation that is scannable by the scanning unit to generate positional signals, the scanning unit including an illumination unit and a detector unit adapted to generate the positional signals, the illumination unit adapted to emit light in a direction of the graduation, the detector unit adapted to detect light modulated by the graduation, the detector unit including a circuit board and a sensor unit arranged as a semiconductor chip; and wherein at least two photodetectors are arranged on a front side of the sensor unit facing the graduation, electrical connections of the sensor unit routed to contact surfaces on a rear side by metallic vias, the sensor unit connected via the contact surfaces to corresponding contact surfaces on the circuit board.