POLYMERIC LAPPING MATERIALS, MEDIA AND SYSTEMS INCLUDING POLYMERIC LAPPING MATERIAL, AND METHODS OF FORMING AND USING SAME

摘要

A polymeric material suitable for use in lapping processes, media including the polymeric material, systems including the media, and methods of forming and using the polymeric material are disclosed. The polymeric material can be used to lap hard surfaces, such as sapphire surfaces. The lapping process can be performed after a grinding process and before a polishing process.

主权项

1. A lapping system comprising:
a platen; a polymeric material attached to the platen, wherein a density of the polymeric material ranges from about 0.7 g/cm3 to about 3.0 g/cm3; and a slurry comprising abrasive particles.