LTPS ARRAY PANEL AND MANUFACTURING METHOD THEREOF

摘要

A low temperature polysilicon (LTPS) array panel and a manufacturing method thereof. The method comprises: forming a source and a drain on a substrate (21); forming a polysilicon layer having a first area and a second area on the substrate (21) comprising the source and drain, wherein the first area of the polysilicon layer has a thickness exceeding that of the second area, and a polysilicon layer portion in the first area covers the source and drain; performing a passivation process on a surface of the polysilicon layer to convert portions close to surfaces of the first area and the second area of the polysilicon layer into an insulation layer (24); and forming a gate on the insulation layer (24) between the source and drain. The method can simplify LTPS process and reduce manufacturing costs.