| 摘要 |
According to the present invention, an inspection is performed to identify leaks in valves provided in a plurality of pipelines connected to a plurality of gas sources. In a method according to one embodiment, a first valve provided in a first pipeline connected to a gas source is closed, and a second valve provided in the first pipeline downstream of the first valve is opened. A pressure increase downstream of the first pipeline is then detected using a pressure gauge. The first valve is then opened and the second valve is closed. A pressure increase downstream of the first pipeline is then detected using the pressure gauge. |
