摘要 |
The method for determining the concentrations of dopant impurities in a silicon sample includes provision of a silicon ingot including donor-type dopant impurities and acceptor-type dopant impurities, a step for determining the position of a first area of the ingot in which a transition takes place between a first conductivity type and a second opposite conductivity type, a step for measuring the concentration of free charge carriers in the second area of the ingot, distinct from the first area, by Hall effect, Fourier transform infrared spectroscopy or a method using the lifetime of the charge carriers, and a step for determining the concentrations of dopant impurities in the sample from the position of the first area and the concentration of free charge carriers in the second area of the ingot. |