APPARATUS FOR CONTROLLING HEAT FLOW WITHIN A SILICON MELT
摘要
An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
申请公布号
EP3122921(A1)
申请公布日期
2017.02.01
申请号
EP20150767728
申请日期
2015.03.17
申请人
Varian Semiconductor Equipment Associates, Inc.
发明人
KELLERMAN, Peter L.;CARLSON, Frederick M.;MORRELL, David;MORADIAN, Ala;DESAI, Nandish