发明名称 APPARATUS FOR CONTROLLING HEAT FLOW WITHIN A SILICON MELT
摘要 An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
申请公布号 EP3122921(A1) 申请公布日期 2017.02.01
申请号 EP20150767728 申请日期 2015.03.17
申请人 Varian Semiconductor Equipment Associates, Inc. 发明人 KELLERMAN, Peter L.;CARLSON, Frederick M.;MORRELL, David;MORADIAN, Ala;DESAI, Nandish
分类号 C30B15/20;C30B29/06 主分类号 C30B15/20
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