| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for cleaning a probe by removing a substance stuck to the probe by a simple structure.SOLUTION: A probe cleaning mechanism includes a pair of cleaning members 603 for cleaning a probe 116. By gradually moving one cleaning member 603 and the other cleaning member 603 up to a contact position interlocking with descending of the probe 116 up to a cleaning position, the probe 116 is held between the one cleaning member 603 and the other cleaning member 603, and until the probe 116 is pulled out from the cleaning members 603, a contact state of the one cleaning member 603 and the other cleaning member 603 is maintained. |
