| 摘要 |
PROBLEM TO BE SOLVED: To provide a gallium oxide powder excellent in dispersibility as a gallium oxide powder capable of preferably producing a spattering target as an In-Ga-Zn complex oxide.SOLUTION: The gallium oxide powder is characterized in that: in a log differentiation void volume distribution measured by a mercury penetration porosimeter, there is a peak in a range of void volume diameter 0.1 μm-1.0 μm and void cumulative volume of the void volume diameter is 0.35 cm/g-0.60 cm/g. |
