发明名称 13族窒化物結晶の製造方法、及び13族窒化物結晶の製造装置
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a group 13 nitride crystal having enlarged c surface.SOLUTION: A method for manufacturing a group 13 nitride crystal comprises: a dissolution step for dissolving nitrogen into a melt mixture 24 in a reaction vessel 52 holding the melt mixture 24 containing at least one of alkali metal and alkali earth metal and group 13 metal, a seed crystal 30 of hexagonal structure placed in the melt mixture 24 having m surface and a suppression member 32 for suppressing a transition of +c axial end of the m surface to -c axial direction or a transition of -c axial end of the m surface to +c axial direction accompanied with a crystal growth of the seed crystal 30; and a crystallization step for growing the nitride crystal on the seed crystal 30.
申请公布号 JP6070257(B2) 申请公布日期 2017.02.01
申请号 JP20130032531 申请日期 2013.02.21
申请人 株式会社リコー 发明人 林 昌弘;皿山 正二;佐藤 隆;三好 直哉
分类号 C30B29/38;C30B19/12 主分类号 C30B29/38
代理机构 代理人
主权项
地址