COMPOSITION FOR FORMING CERIUM-DOPED PZT PIEZOELECTRIC FILM

摘要

A composition for forming a Ce-doped PZT-based piezoelectric film contains: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone. The PZT-based precursors are contained so that a metal atom ratio (Pb:Ce:Zr:Ti) in the composition satisfies (1.00 to 1.28):(0.005 to 0.05):(0.40 to 0.55):(0.60 to 0.45) and the total of Zr and Ti in a metal atom ratio is 1. A concentration of the PZT-based precursor in 100 mass% of the composition is from 17 mass% to 35 mass% in terms of an oxide concentration, a rate of diol in 100 mass% of the composition is from 16 mass% to 56 mass%, and a molar ratio of polyvinylpyrrolidone to I mole of the PZT-based precursor is 0.01 moles to 0.25 moles in terms of monomers.