An interferometric device for measurement of shape deviations of optical elements

摘要

The invention relates to a device for measurement of shape deviations of optical elements, comprising a radiation source connected to an interferometer provided with the detector (7) of radiation; the device further comprises the control and evaluation system (8). The source of radiation is the laser source (1) of radiation having an output radiation of at least two different wavelengths. The detector (7) of radiation consists of a matrix image sensor for immediate acquisition of an interferogram of the entire surface of the measured object (11). The control and evaluation system (8) includes software and means for taking measurements at different wavelengths of the laser source (1) of radiation and for acquiring and evaluating the measured surface of the measured object (11) from at least two different interferograms of the entire surface of the measured object (11).