发明名称 基板搬送方法および基板搬送装置
摘要 PROBLEM TO BE SOLVED: To provide a substrate transfer method and a substrate transfer device, capable of bonding chips to all islands of one substrate in one time of carrying-out of the one substrate from a transfer path.SOLUTION: In a substrate transfer method in which a plurality of strip-like substrates on which a plurality of islands are formed at predetermined pitch along a longitudinal direction are sequentially transferred along the longitudinal direction, an adhesive agent is applied to the islands on the strip-like substrates at a dispensing position on an upstream side, and then chips are bonded to the islands on the strip-like substrates at a bonding position on a downstream side, a dispensing process is performed by sending back the islands having passed through the dispensing position to the dispensing position and a bonding process is performed by sending back the islands having passed through the bonding position to the bonding position.
申请公布号 JP6073625(B2) 申请公布日期 2017.02.01
申请号 JP20120216724 申请日期 2012.09.28
申请人 キヤノンマシナリー株式会社 发明人 河合 慎也
分类号 H01L21/677;H01L21/50;H05K13/02;H05K13/04 主分类号 H01L21/677
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