| 摘要 |
PROBLEM TO BE SOLVED: To provide a tetracarboxylic acid dianhydride which allows synthesis of a polyimide precursor having good developability, capable of reducing warpage after baking or warpage due to moisture absorption after baking, and having excellent HAST resistance.SOLUTION: The tetracarboxylic acid dianhydride is expressed by general formula (1). In the formula, Rrepresents a divalent organic group having at least one cyclic structure; m and n each independently represents an integer of 1 or more and m+n is 2 or more and 30 or less; Rand Reach independently represent hydrogen or an alkyl group having 1 or more carbon atoms and the sum of carbon atoms in Rand Ris 2 or more and 9 or less; Rrepresents an alkylene group having 1 to 8 carbon atoms; the sum of carbon atoms in R, Rand Rin each repeating unit is 3 or more and 10 or less; and structures of R, Rand Rpresent in a plurality of numbers in the formula may be the same or different from one another. |
