| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro sensor and the like capable of preventing sticking without hindering mutual vibration energy exchange and suppressing influences by a common mode with respect to a vibration mode in a driving system where two vibration bodies vibrate in a reverse phase.SOLUTION: A gyro sensor includes: a base body; a vibration body; a first fixed part and a second fixed part provided for the base body; a spring part extending in the direction along a first axis from the first fixed part to the vibration body; a drive part for exciting the vibration body; and a detection part provided for the vibration body. The vibration body has: a first and second vibration bodies which are provided in parallel in the direction along the first axis in planar view and vibrate in a reverse phase; a coupling spring part for coupling the first and second vibration bodies in the direction along the first axis; and a first elastic body which extends from the coupling spring part in the direction along a second axis crossing the first axis and is fixed to the second fixed part. |
