| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator in which the stability of the output of a laser beam and the position of the beam is increased by suppressing the bending deformation of a waveguide caused by the difference between a pair of electrodes in elongation in a longitudinal direction owing to thermal expansion.SOLUTION: A gas laser oscillator 100 comprises: a container 106 with gas sealed therein; a pair of electrodes 102 and 103 which are coupled together by inter-electrode distance support members 109 in the container 106; and a waveguide 110 formed by the pair of electrodes. The inter-electrode distance support members 109 are arranged to have flexibility in a longitudinal direction of the pair of electrodes and therefore, the inter-electrode distance support members 109 are arranged to be able to absorb the difference between the pair of electrodes 102 and 103 in elongation in the longitudinal direction owing to thermal expansion. |
